RS-C Reticle Storage and Inspection System

The RS-C is a fully automated, highly flexible standalone storage and inspection system for 6" reticles based on a modular, cartesian platform. The flexibility offered in size, features and functionality make it ideal for a variety of applications in new or existing production facilities. The RS-C system supports reticle storage, retrieval and transfer between a variety of reticle carrier types. The high throughput the RS-C achieves optimizes reticle logistics and scanner/stepper utilization.

주요 기능

  • Reticle storage in Tec-Cell® micro-environment
  • Stores and manages from 360 up to 1776 reticles
  • Up to four load ports supported: RSP, MRSP, Nikon/Canon cassettes and shippers
  • Particle and pellicle defect inspection
  • Air knife and reticle orientation

Options include:

  • N2/xCDA purge
  • Particle Detection System (PDS)
  • Bright field detection option for PDS
  • Macro Inspection Unit (MIU)
  • Rotary / Air knife unit
  • Airborne Molecular Contamination (AMC) filtering

장점

  • Increased scanner/litho cell uptime
  • No scanner idle time; defined reticle arrives safe, on time, correctly orientated, clean with controlled quality
  • Reduced reticle rework costs
  • Reticle is protected from chemical contamination, haze & crystal growth
  • Increased number of possible exposures results in a high wafer in process (WIP) cycle time
  • Quality control, certifiable solution
  • Fully automated reticle handling, defined inspection procedures
  • Reliable, safe handling prevents reticle and pellicle damages, as well as human mistakes
  • Low cost of ownership (COO)
  • Low purge gas consumption (0.375 slpm/recticle)